Raman spectra of a-SiI_xN,:H films following natural ageing

Gerasimov, V.; Герасимов, Віталій Вікторович; Mitsa, V.; Міца, В.

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dc.contributor.author	Gerasimov, V.
dc.contributor.author	Герасимов, Віталій Вікторович
dc.contributor.author	Mitsa, V.
dc.contributor.author	Міца, В.
dc.date.accessioned	2020-06-17T10:27:25Z
dc.date.available	2020-06-17T10:27:25Z
dc.date.issued	1997
dc.identifier.uri	http://dspace.msu.edu.ua:8080/jspui/handle/123456789/6790
dc.description	Gerasimov V. Raman spectra of a-SiI_xN,:H films following natural ageing / V. Gerasimov, V. Mitsa // Journal of Molecular Structure. - Elsevier Science B.V. - 1997. - P.245-247	en_US
dc.description.abstract	The results are given of a comparison of vibrational spectra for a-Si,N ,,:H films on their natural ageing over the course of four years. The films of a-Si r,N,:H with varying concentrations of NH3, 2%. 4%, and 6%, were prepared from NH3 + SiH4 + H2 gas mixture by plasma deposition. It is revealed that in the films containing 2% NH3 in the mixture, there is crystallization with c-Si separation. However, with 6% and 10% of NH3, the mixture stabilizes the amorphous state and does not influence the vibrational spectra and optical properties of the films	en_US
dc.language.iso	en	en_US
dc.publisher	Elsevier Science	en_US
dc.subject	Raman spectra	en_US
dc.subject	Crystallization	en_US
dc.subject	Edge absorption	en_US
dc.subject	Natural ageing	en_US
dc.subject	Раманові спектри	en_US
dc.subject	кристалізація	en_US
dc.subject	поглинання краю	en_US
dc.subject	природне старіння	en_US
dc.title	Raman spectra of a-SiI_xN,:H films following natural ageing	en_US
dc.type	Article	en_US