Gerasimov, Vitaliy; Герасимов, Віталій Вікторович; Mitsa, Vladimir; Мица, Володимир
(Fizika A, 1997)
SIMS profiles of a-Si1-xNx:H films having different composition have been measured. The distribution of hydrogen in nitrided films bears a fluctuating character and its whole content decreases at x < 0.06. In all films, ...