Gerasimov, V.; Герасимов, Віталій Вікторович; Mitsa, V.; Міца, В.
(Elsevier Science, 1997)
The results are given of a comparison of vibrational spectra for a-Si,N ,,:H films on their natural ageing over the course of four years. The films of a-Si r,N,:H with varying concentrations of NH3, 2%. 4%, and 6%, were ...