Ezzel az azonosítóval hivatkozhat erre a dokumentumra forrásmegjelölésben vagy hiperhivatkozás esetén: http://dspace.msu.edu.ua:8080/jspui/handle/123456789/6790
Title: Raman spectra of a-SiI_xN,:H films following natural ageing
Authors: Gerasimov, V.
Герасимов, Віталій Вікторович
Mitsa, V.
Міца, В.
Keywords: Raman spectra
Crystallization
Edge absorption
Natural ageing
Раманові спектри
кристалізація
поглинання краю
природне старіння
Issue Date: 1997
Publisher: Elsevier Science
Abstract: The results are given of a comparison of vibrational spectra for a-Si,N ,,:H films on their natural ageing over the course of four years. The films of a-Si r,N,:H with varying concentrations of NH3, 2%. 4%, and 6%, were prepared from NH3 + SiH4 + H2 gas mixture by plasma deposition. It is revealed that in the films containing 2% NH3 in the mixture, there is crystallization with c-Si separation. However, with 6% and 10% of NH3, the mixture stabilizes the amorphous state and does not influence the vibrational spectra and optical properties of the films
Description: Gerasimov V. Raman spectra of a-SiI_xN,:H films following natural ageing / V. Gerasimov, V. Mitsa // Journal of Molecular Structure. - Elsevier Science B.V. - 1997. - P.245-247
URI: http://dspace.msu.edu.ua:8080/jspui/handle/123456789/6790
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